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Impact of line width roughness on the matching performances of next-generation devices

dc.contributor.authorGustin, Cedric
dc.contributor.authorLeunissen, Peter
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorLorusso, Gian
dc.date.accessioned2021-10-17T07:29:23Z
dc.date.available2021-10-17T07:29:23Z
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13829
dc.sourceIIOimport
dc.titleImpact of line width roughness on the matching performances of next-generation devices
dc.typeJournal article
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorLorusso, Gian
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewyes
dc.source.beginpage3690
dc.source.endpage3696
dc.source.journalThin Solid Films
dc.source.issue11
dc.source.volume516
imec.availabilityPublished - imec


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