Impact of line width roughness on the matching performances of next-generation devices

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Authors

Gustin, Cedric; Leunissen, Peter; Mercha, Abdelkarim; Decoutere, Stefaan; Lorusso, Gian

ISSN

0040-6090

Issue

11

Journal

Thin Solid Films

Volume

516

Title

Impact of line width roughness on the matching performances of next-generation devices

Publication type

Journal article

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