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Phosphorous doping of microcrystalline CVD diamond using modified conditions

dc.contributor.authorHaenen, Ken
dc.contributor.authorLazea, Ileana Andrada
dc.contributor.authorMortet, V.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorGeithner, P.
dc.contributor.authorRistein, J.
dc.date.accessioned2021-10-17T07:30:23Z
dc.date.available2021-10-17T07:30:23Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13833
dc.sourceIIOimport
dc.titlePhosphorous doping of microcrystalline CVD diamond using modified conditions
dc.typeProceedings paper
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.beginpage49
dc.source.endpage55
dc.source.conferenceDiamond Electronics - Fundamentals to Applications II
dc.source.conferencedate26/11/2007
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1039


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