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Functional metal oxides by aqueous solution-gel synthesis thin films, ultrathin films, nanoislands

dc.contributor.authorHardy, An
dc.contributor.authorDe Dobbelaere, C.
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorMullens, J.
dc.date.accessioned2021-10-17T07:31:55Z
dc.date.available2021-10-17T07:31:55Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13839
dc.sourceIIOimport
dc.titleFunctional metal oxides by aqueous solution-gel synthesis thin films, ultrathin films, nanoislands
dc.typeMeeting abstract
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpageI8.1
dc.source.conferenceMRS Spring Meeting Symposium I: Synthesis and Metrology of Nanoscale Oxides and Thin Films
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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