Radiation damage in proton-irradiated strained Si n-MOSFETs

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Authors

Hayama, K.; Takakura, K.; Ohtani, T.; Kudou, T.; Ohyama, H.; Mercha, Abdelkarim; Simoen, Eddy; Claeys, Cor

ISSN

1369-8001

Issue

5_6

Journal

Materials Science in Semiconductor Processing

Volume

11

Title

Radiation damage in proton-irradiated strained Si n-MOSFETs

Publication type

Journal article

Embargo date

9999-12-31

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