ALD for highly scaled CMOS and beyond
| dc.contributor.author | Heyns, Marc | |
| dc.date.accessioned | 2021-10-17T07:40:55Z | |
| dc.date.available | 2021-10-17T07:40:55Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13876 | |
| dc.source | IIOimport | |
| dc.title | ALD for highly scaled CMOS and beyond | |
| dc.type | Oral presentation | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.embargo | 9999-12-31 | |
| dc.source.peerreview | no | |
| dc.source.conference | Tutorial at the 8th International Conference on Atomic Layer Deposition - ALD | |
| dc.source.conferencedate | 29/06/2008 | |
| dc.source.conferencelocation | Brugge Belgium | |
| imec.availability | Published - open access |