pMOS transistor with embedded SiGe: elastic and plastic relaxation issues

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Authors

Hikavyy, Andriy; Bhouri, Nada; Loo, Roger; Verheyen, Peter; Clemente, Francesca; Hopkins, John; Trussell, Rob; Caymax, Matty

ISSN

0040-6090

Issue

1

Journal

Thin Solid Films

Volume

517

Title

pMOS transistor with embedded SiGe: elastic and plastic relaxation issues

Publication type

Journal article

Embargo date

9999-12-31

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Articles