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pMOS transistor with embedded SiGe: elastic and plastic relaxation issues

dc.contributor.authorHikavyy, Andriy
dc.contributor.authorBhouri, Nada
dc.contributor.authorLoo, Roger
dc.contributor.authorVerheyen, Peter
dc.contributor.authorClemente, Francesca
dc.contributor.authorHopkins, John
dc.contributor.authorTrussell, Rob
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-17T07:41:11Z
dc.date.available2021-10-17T07:41:11Z
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13877
dc.sourceIIOimport
dc.titlepMOS transistor with embedded SiGe: elastic and plastic relaxation issues
dc.typeJournal article
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage113
dc.source.endpage116
dc.source.journalThin Solid Films
dc.source.issue1
dc.source.volume517
dc.identifier.urlhttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TW0-4T8HHBC-3&_user=799533&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&
imec.availabilityPublished - open access


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