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A new gap-closing electrostatic vibrational energy harvester employing electrodes vertically integrated with a seismic mass

dc.contributor.authorHohlfeld, Dennis
dc.contributor.authorAltena, Geert
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T07:42:39Z
dc.date.available2021-10-17T07:42:39Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13883
dc.sourceIIOimport
dc.titleA new gap-closing electrostatic vibrational energy harvester employing electrodes vertically integrated with a seismic mass
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage185
dc.source.endpage188
dc.source.conference19th MicroMechanics Europe Workshop - MME
dc.source.conferencedate28/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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