Fabrication, doping and characterization of strained silicon on SiO2 by ion beam techniques

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Authors
Hollaender, Bernd; Buca, Dan; Trinkaus, H.; Mantl, Siegfried; Loo, Roger; Reiche, Manfred
Conference
16th International Conference on Ion Beam Modifications of Materials
Title
Fabrication, doping and characterization of strained silicon on SiO2 by ion beam techniques
Publication type
Oral presentation
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