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Strain measurements in electronic devices by aberration-corrected HRTEM and dark-field holography

dc.contributor.authorHue, Florent
dc.contributor.authorHoudellier, F.
dc.contributor.authorSnoeck, E.
dc.contributor.authorHartmann, J.P.
dc.contributor.authorDestefanis, V.
dc.contributor.authorBender, Hugo
dc.contributor.authorClaverie, Alain
dc.contributor.authorHytch, Martin
dc.date.accessioned2021-10-17T07:46:46Z
dc.date.available2021-10-17T07:46:46Z
dc.date.issued2008-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13900
dc.sourceIIOimport
dc.titleStrain measurements in electronic devices by aberration-corrected HRTEM and dark-field holography
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage123
dc.source.endpage124
dc.source.conference14th European Microscopy Congress
dc.source.conferencedate1/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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