Show simple item record

Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes

dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorBearda, Twan
dc.contributor.authorRosseel, Erik
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorDon, Eric
dc.contributor.authorPavelka, Tibor
dc.date.accessioned2021-10-17T07:48:42Z
dc.date.available2021-10-17T07:48:42Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13908
dc.sourceIIOimport
dc.titleUse of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes
dc.typeProceedings paper
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage397
dc.source.endpage401
dc.source.conferenceIEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC
dc.source.conferencedate5/05/2008
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
16305.pdf
Size:
731.4Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record