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Indium-assisted growth of Si nanowires: perspectives on controlled growth for CMOS applications
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Authors
Iacopi, Francesca
;
Eichhammer, Yann
;
Massy, Claire
;
Vereecken, Philippe
;
Moelans, Nele
;
Richard, Olivier
;
Smeets, Dries
;
Blanpain, Bart
;
De Gendt, Stefan
;
Heyns, Marc
Conference
Semiconductor Nanowires - Growth, Physics, Devices and Applications
Title
Indium-assisted growth of Si nanowires: perspectives on controlled growth for CMOS applications
Publication type
Proceedings paper
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