Plasma-enhanced growth of In seeded Si nanowires and poly-crystalline layers

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Authors
Iacopi, Francesca; Vereecken, Philippe; De Gendt, Stefan; Caymax, Matty; Heyns, Marc
Conference
IUMRS International Conference in Asia - IUMRS-ICA
Title
Plasma-enhanced growth of In seeded Si nanowires and poly-crystalline layers
Publication type
Proceedings paper
Embargo date
9999-12-31
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