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Study of the dynamics of local particle removal efficiencies using localized haze maps

dc.contributor.authorJanssens, Tom
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorKenis, Karine
dc.contributor.authorArnauts, Sophia
dc.contributor.authorBearda, Twan
dc.contributor.authorWostyn, Kurt
dc.contributor.authorSimpson, G.
dc.contributor.authorSteinbach, A.
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-17T07:52:53Z
dc.date.available2021-10-17T07:52:53Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13924
dc.sourceIIOimport
dc.titleStudy of the dynamics of local particle removal efficiencies using localized haze maps
dc.typeProceedings paper
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage233
dc.source.endpage236
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces VIII - UCPSS
dc.source.conferencedate18/09/2006
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - open access
imec.internalnotesSolid State Phenomena; Vol. 134


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