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Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting

dc.contributor.authorKarakaya, Koray
dc.contributor.authorRenaud, Michael
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T07:56:25Z
dc.date.available2021-10-17T07:56:25Z
dc.date.issued2008
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13938
dc.sourceIIOimport
dc.titleEffect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage104012
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue10
dc.source.volume18
imec.availabilityPublished - open access


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