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Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting
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1901 since deposited on 2021-10-17
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Acq. date: 2026-01-10
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1901 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-01-10
Citations