Publication:
Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1899 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2025-12-10
Citations
Metrics
Views
1899 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2025-12-10
Citations