Authors

Karakaya, Koray; Renaud, Michael; Goedbloed, Martijn; van Schaijk, Rob

ISSN

0960-1317

Issue

10

Journal

Journal of Micromechanics and Microengineering

Volume

18

Title

Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting

Publication type

Journal article

Embargo date

9999-12-31