Publication:

Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting

Date

2008
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorKarakaya, Koray
dc.contributor.authorRenaud, Michael
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T07:56:25Z
dc.date.available2021-10-17T07:56:25Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13938
dc.source.beginpage104012
dc.source.issue10
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume18
dc.title

Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
17558.pdf
Size:
459.82 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles