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Effect of the built-in stress level of AlN layers on their dielectric and piezoelectric properties with perspectives on energy harvesting
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1895 since deposited on 2021-10-17
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Acq. date: 2025-10-24
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1895 since deposited on 2021-10-17
417item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations