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Collapse behavior and forces of multistack patterns

dc.contributor.authorKim, Tae-Gon
dc.contributor.authorWostyn, Kurt
dc.contributor.authorMertens, Paul
dc.contributor.authorBusnaina, Ahmed
dc.contributor.authorPark, Jin Goo
dc.date.accessioned2021-10-17T07:59:55Z
dc.date.available2021-10-17T07:59:55Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13951
dc.sourceIIOimport
dc.titleCollapse behavior and forces of multistack patterns
dc.typeProceedings paper
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSematech Surface Preparation and Cleaning Conference
dc.source.conferencedate31/03/2008
dc.source.conferencelocationAustin, TX US
imec.availabilityPublished - open access


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