Silicides and Germanides for Nano-CMOS Applications

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Authors
Kittl, Jorge; Opsomer, Karl; Torregiani, Cristina; Demeurisse, Caroline; Mertens, Sofie; Brunco, David; Van Dal, Mark; Lauwers, Anne
Journal
Materials Sience and Engineering B
Volume
154-155
Title
Silicides and Germanides for Nano-CMOS Applications
Publication type
Journal article
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