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Silicides and Germanides for Nano-CMOS Applications

dc.contributor.authorKittl, Jorge
dc.contributor.authorOpsomer, Karl
dc.contributor.authorTorregiani, Cristina
dc.contributor.authorDemeurisse, Caroline
dc.contributor.authorMertens, Sofie
dc.contributor.authorBrunco, David
dc.contributor.authorVan Dal, Mark
dc.contributor.authorLauwers, Anne
dc.date.accessioned2021-10-17T08:00:47Z
dc.date.available2021-10-17T08:00:47Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13954
dc.sourceIIOimport
dc.titleSilicides and Germanides for Nano-CMOS Applications
dc.typeJournal article
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorDemeurisse, Caroline
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorLauwers, Anne
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.source.peerreviewno
dc.source.beginpage144
dc.source.endpage154
dc.source.journalMaterials Sience and Engineering B
dc.source.volume154-155
imec.availabilityPublished - imec


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