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Strain enhanced Low-VT CMOS featuring La/Al-doped HfSiO/TaC and 10ps invertor delay

dc.contributor.authorKubicek, Stefan
dc.contributor.authorSchram, Tom
dc.contributor.authorRohr, Erika
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorVos, Rita
dc.contributor.authorDemand, Marc
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorWitters, Thomas
dc.contributor.authorNyns, Laura
dc.contributor.authorDelabie, Annelies
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorChiarella, Thomas
dc.contributor.authorKerner, Christoph
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorParvais, Bertrand
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorOrtolland, Claude
dc.contributor.authorYu, HongYu
dc.contributor.authorVeloso, Anabela
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorSinganamalla, Raghunath
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorBrus, Stephan
dc.contributor.authorVrancken, Christa
dc.contributor.authorChang, V.S.
dc.contributor.authorChang, Shou-Zen
dc.contributor.authorMitsuhashi, Riichirou
dc.contributor.authorOkuno, Yasutoshi
dc.contributor.authorAkheyar, Amal
dc.contributor.authorCho, Hag-Ju
dc.contributor.authorHooker, J.
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorJurczak, Gosia
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-17T08:03:40Z
dc.date.available2021-10-17T08:03:40Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13964
dc.sourceIIOimport
dc.titleStrain enhanced Low-VT CMOS featuring La/Al-doped HfSiO/TaC and 10ps invertor delay
dc.typeProceedings paper
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage130
dc.source.endpage131
dc.source.conferenceSymposium on VLSI Technology Digest of Technical Papers
dc.source.conferencedate17/06/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access


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