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Determination of the piezoresistivity of microcrystalline silicon-germanium and application to a pressure sensor

dc.contributor.authorLenci, Silvia
dc.contributor.authorGonzalez, Pilar
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorFrederickx, Danny
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T08:14:52Z
dc.date.available2021-10-17T08:14:52Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14006
dc.sourceIIOimport
dc.titleDetermination of the piezoresistivity of microcrystalline silicon-germanium and application to a pressure sensor
dc.typeProceedings paper
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan Hoof, Rita
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage427
dc.source.endpage430
dc.source.conference21st IEEE International Conference on Micro Electro Mechnical Systems - MEMS
dc.source.conferencedate13/01/2008
dc.source.conferencelocationTucson, AZ USA
imec.availabilityPublished - open access


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