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Patterning of SiO2/Si3N4 electret

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T08:15:42Z
dc.date.available2021-10-17T08:15:42Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14009
dc.sourceIIOimport
dc.titlePatterning of SiO2/Si3N4 electret
dc.typeMeeting abstract
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.conferenceProceedings of the 13th International Symposium on Electrets - ISE
dc.source.conferencedate15/09/2008
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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