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Self-supported and membrane-supported bulk-micromachined thermopiles for energy scavengers

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVullers, Ruud
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.date.accessioned2021-10-17T08:16:14Z
dc.date.available2021-10-17T08:16:14Z
dc.date.issued2008-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14011
dc.sourceIIOimport
dc.titleSelf-supported and membrane-supported bulk-micromachined thermopiles for energy scavengers
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpageO-17-1
dc.source.endpageO-17-4
dc.source.conference6th European Conference on Thermoelectrics
dc.source.conferencedate2/07/2008
dc.source.conferencelocationParis France
imec.availabilityPublished - imec


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