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Low temperature epitaxy and the importance of moisture control
Publication:
Low temperature epitaxy and the importance of moisture control
Date
2008
Journal article
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17808.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Leys, Frederik
;
Hikavyy, Andriy
;
Machkaoutsan, Vladimir
;
De Vos, Brecht
;
Geenen, Luc
;
Van Daele, Benny
;
Loo, Roger
;
Caymax, Matty
Journal
Thin Solid Films
Abstract
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1
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2021
since deposited on 2021-10-17
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Downloads
1
since deposited on 2021-10-17
Acq. date: 2025-10-24
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2021
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations