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Low temperature epitaxy and the importance of moisture control

dc.contributor.authorLeys, Frederik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorGeenen, Luc
dc.contributor.authorVan Daele, Benny
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-17T08:17:52Z
dc.date.available2021-10-17T08:17:52Z
dc.date.issued2008
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14017
dc.sourceIIOimport
dc.titleLow temperature epitaxy and the importance of moisture control
dc.typeJournal article
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage416
dc.source.endpage418
dc.source.journalThin Solid Films
dc.source.volume517
imec.availabilityPublished - open access


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