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Evaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition

dc.contributor.authorLeys, Frederik
dc.contributor.authorLiu, Cong
dc.contributor.authorShi, Xiaoping
dc.contributor.authorLamare, B.
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorSchaekers, Marc
dc.contributor.authorLoo, Roger
dc.contributor.authorWoelk, E.
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-17T08:18:30Z
dc.date.available2021-10-17T08:18:30Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14019
dc.sourceIIOimport
dc.titleEvaluation of DiMethylAminoGermaniumTriChloride as a novel carbon-dopant and germanium precursor for germanium and silicon germanium chemical vapor deposition
dc.typeMeeting abstract
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2386
dc.source.conference214th ECS Meeting
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. MA 2008-02


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