dc.contributor.author | Li, Zilan | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Kerner, Christoph | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Singanamalla, Raghunath | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Hoffmann, Thomas Y. | |
dc.contributor.author | Rohr, Erika | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-10-17T08:22:19Z | |
dc.date.available | 2021-10-17T08:22:19Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14032 | |
dc.source | IIOimport | |
dc.title | Effective metal gate work function modification by ion implantation with W-based gate stack | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Kerner, Christoph | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | no | |
dc.source.conference | 5th International Symposium on Advanced Gate Stack Technology | |
dc.source.conferencedate | 28/09/2008 | |
dc.source.conferencelocation | Austin, TX USA | |
imec.availability | Published - imec | |