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Physical design and mask synthesis considerations for DPT

dc.contributor.authorLucas, Kevin
dc.contributor.authorCork, Chris
dc.contributor.authorHapli, John
dc.contributor.authorMiloslavsky, Alex
dc.contributor.authorWiaux, Vincent
dc.contributor.authorVerhaegen, Staf
dc.date.accessioned2021-10-17T08:34:02Z
dc.date.available2021-10-17T08:34:02Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14072
dc.sourceIIOimport
dc.titlePhysical design and mask synthesis considerations for DPT
dc.typeProceedings paper
dc.contributor.imecauthorWiaux, Vincent
dc.source.peerreviewno
dc.source.conferenceSEMATECH Litho Forum
dc.source.conferencedate13/05/2008
dc.source.conferencelocationBolton Landing, NY USA
imec.availabilityPublished - imec


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