Additive influence on filling microvias with copper
dc.contributor.author | Luhn, Ole | |
dc.contributor.author | Ruythooren, Wouter | |
dc.contributor.author | Van Hoof, Chris | |
dc.contributor.author | Celis, Jean-Pierre | |
dc.date.accessioned | 2021-10-17T08:35:32Z | |
dc.date.available | 2021-10-17T08:35:32Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14077 | |
dc.source | IIOimport | |
dc.title | Additive influence on filling microvias with copper | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Ruythooren, Wouter | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.source.peerreview | no | |
dc.source.conference | Gordon Research Conference | |
dc.source.conferencedate | 27/07/2008 | |
dc.source.conferencelocation | New London, NH USA | |
imec.availability | Published - imec |
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