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Printability verification for double-patterning technology
Publication:
Printability verification for double-patterning technology
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Luk-Pat, Gerard
;
Panaite, Petrisor
;
Lucas, Kevin
;
Cork, Christopher
;
Wiaux, Vincent
;
Verhaegen, Staf
;
Maenhoudt, Mireille
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Abstract
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1884
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1884
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations