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Screening self-assembled monolayers as Cu diffusion barriers
Publication:
Screening self-assembled monolayers as Cu diffusion barriers
Date
2008
Journal article
Simple item page
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18768.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maestre Caro, Arantxa
;
Maes, Guido
;
Borghs, Gustaaf
;
Whelan, Caroline
Journal
Microelectronic Engineering
Abstract
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1932
since deposited on 2021-10-17
419
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1932
since deposited on 2021-10-17
419
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations