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Screening self-assembled monolayers as Cu diffusion barriers

dc.contributor.authorMaestre Caro, Arantxa
dc.contributor.authorMaes, Guido
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorWhelan, Caroline
dc.date.accessioned2021-10-17T08:40:59Z
dc.date.available2021-10-17T08:40:59Z
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14096
dc.sourceIIOimport
dc.titleScreening self-assembled monolayers as Cu diffusion barriers
dc.typeJournal article
dc.contributor.imecauthorBorghs, Gustaaf
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2047
dc.source.endpage2050
dc.source.journalMicroelectronic Engineering
dc.source.issue10
dc.source.volume85
imec.availabilityPublished - open access


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