Authors

Pereira, Ricardo; Van Hove, Marleen; Van Rossum, Marc

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

14

Title

Modifications of the three-dimensional transport properties of Si-doped Al0.25Ga0.75As exposed to CH 4/H2 reactive ion etching

Publication type

Journal article

Embargo date

9999-12-31