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Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning

dc.contributor.authorMalhouitre, Stephane
dc.contributor.authorVos, Rita
dc.contributor.authorBanerjee, Souvik
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-17T08:43:37Z
dc.date.available2021-10-17T08:43:37Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14105
dc.sourceIIOimport
dc.titleImpact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSematech Surface Preparation and Cleaning conference
dc.source.conferencedate31/03/2008
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - open access


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