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AlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range

dc.contributor.authorMalinowski, Pawel
dc.contributor.authorJohn, Joachim
dc.contributor.authorLorenz, Anne
dc.contributor.authorAparicio Alonso, Patricia
dc.contributor.authorGermain, Marianne
dc.contributor.authorDerluyn, Joff
dc.contributor.authorCheng, Kai
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorMertens, Robert
dc.contributor.authorDuboz, Jean Yves
dc.contributor.authorSemond, Fabrice
dc.contributor.authorHochedez, J.-F.
dc.contributor.authorBenmoussa, A.
dc.date.accessioned2021-10-17T08:44:20Z
dc.date.available2021-10-17T08:44:20Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14107
dc.sourceIIOimport
dc.titleAlGaN photodetectors for applications in the extreme ultraviolet (EUV) wavelength range
dc.typeProceedings paper
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.source.peerreviewno
dc.source.beginpage70030N
dc.source.conferenceOptical Sensors 2008
dc.source.conferencedate7/04/2008
dc.source.conferencelocationStrasbourg France
dc.identifier.urlhttp://dx.doi.org/10.1117/12.780948
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 7003


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