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Articles
MEMS on CMOS pave the way to smart integrated systems
Publication:
MEMS on CMOS pave the way to smart integrated systems
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Date
2008
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18177.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Marent, Katrien
Journal
SEMI News
Abstract
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1878
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations
Metrics
Views
1878
since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations