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MEMS on CMOS pave the way to smart integrated systems

dc.contributor.authorMarent, Katrien
dc.date.accessioned2021-10-17T08:48:24Z
dc.date.available2021-10-17T08:48:24Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14121
dc.sourceIIOimport
dc.titleMEMS on CMOS pave the way to smart integrated systems
dc.typeJournal article
dc.contributor.imecauthorMarent, Katrien
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage24
dc.source.journalSEMI News
dc.source.issue4
dc.source.volume24
imec.availabilityPublished - open access
imec.internalnotesin Japanese


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