Optical characteristics and UV modification of low-k materials
dc.contributor.author | Marsik, Prema | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Claeys, Cor | |
dc.date.accessioned | 2021-10-17T08:49:13Z | |
dc.date.available | 2021-10-17T08:49:13Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14124 | |
dc.source | IIOimport | |
dc.title | Optical characteristics and UV modification of low-k materials | |
dc.type | Proceedings paper | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 765 | |
dc.source.endpage | 768 | |
dc.source.conference | 9th International Conference on Solid-State and Integrated-Circuit Technology - ICSICT | |
dc.source.conferencedate | 20/10/2008 | |
dc.source.conferencelocation | Beijing China | |
imec.availability | Published - open access |