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High precision LIGA structures for optical fibre-in-board technology

dc.contributor.authorPicard, A.
dc.contributor.authorEhrfeld, W.
dc.contributor.authorReinhardt, J.
dc.contributor.authorMorlion, D.
dc.contributor.authorVandewege, Jan
dc.contributor.authorVetter, P. J.
dc.date.accessioned2021-09-29T15:17:09Z
dc.date.available2021-09-29T15:17:09Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1413
dc.sourceIIOimport
dc.titleHigh precision LIGA structures for optical fibre-in-board technology
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage77
dc.source.endpage80
dc.source.conferenceEuPac '96.2nd European Conference on Electronic Packaging Technology and 8th International Conference on Interconnection Technol
dc.source.conferencelocation
imec.availabilityPublished - imec


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