dc.contributor.author | Mertens, Paul | |
dc.contributor.author | Vos, Rita | |
dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Janssens, Tom | |
dc.contributor.author | Wostyn, Kurt | |
dc.contributor.author | Claes, Martine | |
dc.contributor.author | Kesters, Els | |
dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Hoyer, Ronald | |
dc.contributor.author | Andreas, Michael | |
dc.contributor.author | Kim, Kyung Hyun | |
dc.contributor.author | Barbagini, Francesca | |
dc.contributor.author | Zijlstra, Aaldert | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Kim, Tae-Gon | |
dc.contributor.author | Kenis, Karine | |
dc.contributor.author | Arnauts, Sophia | |
dc.contributor.author | Lux, Marcel | |
dc.contributor.author | Bearda, Twan | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-17T09:00:23Z | |
dc.date.available | 2021-10-17T09:00:23Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14159 | |
dc.source | IIOimport | |
dc.title | Roadblocks and critical aspects for sub 45 nm wafer cleaning and possible solutions | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | Vos, Rita | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Wostyn, Kurt | |
dc.contributor.imecauthor | Claes, Martine | |
dc.contributor.imecauthor | Kesters, Els | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | Kenis, Karine | |
dc.contributor.imecauthor | Arnauts, Sophia | |
dc.contributor.imecauthor | Lux, Marcel | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | Wostyn, Kurt::0000-0003-3995-0292 | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Vos, Rita::0000-0003-2610-3406 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 436 | |
dc.source.endpage | 446 | |
dc.source.conference | 7th International Semiconductor Technology Conference - ISTC | |
dc.source.conferencedate | 15/03/2008 | |
dc.source.conferencelocation | Shanghai China | |
imec.availability | Published - imec | |