Publication:

In-situ spatial analysis of RF voltage during plasma etching

Date

2008
Proceedings Paper
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16564.pdf 269.44 KB

Author(s)

Milenin, Alexey  
;
de Marneffe, Jean-Francois  
;
Struyf, Herbert  
;
Boullart, Werner  

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1835 since deposited on 2021-10-17
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