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Scanning spreading resistance microscopy for 3D-carrier Pprofiling in FinFET-based structures

dc.contributor.authorMody, Jay
dc.contributor.authorEyben, Pierre
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T09:06:35Z
dc.date.available2021-10-17T09:06:35Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14179
dc.sourceIIOimport
dc.titleScanning spreading resistance microscopy for 3D-carrier Pprofiling in FinFET-based structures
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage1070-E01-11
dc.source.conferenceDoping Engineering for Front-End Processing
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Fransisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1070


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