dc.contributor.author | Nada, Yasseen | |
dc.contributor.author | Stoffels, Steve | |
dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | Hegazi, E. | |
dc.contributor.author | Ragai, H.F. | |
dc.contributor.author | Shaarawi, A.M. | |
dc.date.accessioned | 2021-10-17T09:15:25Z | |
dc.date.available | 2021-10-17T09:15:25Z | |
dc.date.issued | 2008-04 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14208 | |
dc.source | IIOimport | |
dc.title | Circular MEM resonator: modeling second order effects on resonance frequency | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Stoffels, Steve | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems - EuroSimE | |
dc.source.conferencedate | 20/04/2008 | |
dc.source.conferencelocation | Delft The Netherlands | |
imec.availability | Published - open access | |