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2D direct X-ray sensor on the base of a-SiN:H thin films

dc.contributor.authorPopov, I.
dc.contributor.authorVan Calster, Andre
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorBoesman, E.
dc.contributor.authorCallens, F.
dc.date.accessioned2021-09-29T15:17:52Z
dc.date.available2021-09-29T15:17:52Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1421
dc.sourceIIOimport
dc.title2D direct X-ray sensor on the base of a-SiN:H thin films
dc.typeProceedings paper
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.imecauthorDe Smet, Herbert
dc.source.peerreviewno
dc.source.beginpage431
dc.source.endpage433
dc.source.conferenceProceedings of the 16th International Display Research Conference 1996; October 1996. Birmingham, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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