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Modeling and experiments of dopant diffusion and defects for laser annealed junctions and advanced USJ
Publication:
Modeling and experiments of dopant diffusion and defects for laser annealed junctions and advanced USJ
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Date
2008
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15120.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Noda, Taji
;
Vandervorst, Wilfried
;
Felch, S.
;
Parihar, V.
;
Vrancken, Christa
;
Hoffmann, Thomas Y.
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1895
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Acq. date: 2025-12-11
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Views
1895
since deposited on 2021-10-17
2
last month
2
last week
Acq. date: 2025-12-11
Citations