Publication:

Study of the surface reactions of ALD hafnium aluminates

Date

2008

Meeting abstract

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Author(s)

;

Delabie, Annelies

;

Pourtois, Geoffrey

;

Van Elshocht, Sven

;

Vinckier, Chris

;

De Gendt, Stefan

Metrics

1807 since deposited on 2021-10-17

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Acq. date: 2025-12-17