Silicon orientation effects in the atomic layer deposition of hafnium oxide

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Authors

Nyns, Laura; Ragnarsson, Lars-Ake; Hall, L.; Delabie, Annelies; Heyns, Marc; Van Elshocht, Sven; Vinckier, Chris; Zimmerman, Paul; De Gendt, Stefan

ISSN

0013-4651

Issue

2

Journal

Journal of the Electrochemical Society

Volume

155

Title

Silicon orientation effects in the atomic layer deposition of hafnium oxide

Publication type

Journal article

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